Carbon tetrafluoride

Carbon tetrafluoride (CAS 75-73-0, EC 200-896-5), also known as CF4, R 14, FC-14, and PFC-14, is a fully fluorinated compound supplied as a compressed gas. It carries no E-code designation. Its high chemical stability and low reactivity make it a distinct material within the fluorocarbon family.

In semiconductor fabrication, CF4 is used as a plasma etching gas, where fluorine radicals generated in the plasma selectively remove silicon dioxide and silicon nitride layers with high precision. In aerospace component manufacturing, it functions as a cleaning agent, displacing contaminants from metal surfaces through its non-reactive, non-flammable carrier properties.

Carbon tetrafluoride is supplied in high-purity electronic grade and standard industrial grade in pressurized cylinders. It is subject to REACH registration requirements within the EU. Buyers should note its classification as a potent greenhouse gas under F-gas regulations, which governs handling, containment, and reporting obligations.