Methyltrichlorosilane

CAS Number
75-79-6
EC Number
200-902-6
Abbreviation
MTS

What is Methyltrichlorosilane?

Methyltrichlorosilane (CAS 75-79-6), commonly abbreviated as MTS, is a reactive chlorosilane monomer used as a fundamental building block in silicone polymer synthesis and surface treatment chemistry.

Where is Methyltrichlorosilane used?

  • Silicone manufacturing: key precursor for methylsilicone resins, fluids, and elastomers through controlled hydrolysis and condensation reactions
  • Electronics: chemical vapor deposition of silicon carbide coatings and surface passivation agent on semiconductor substrates
  • Building and construction: water repellency on mineral substrates such as concrete, stone, and masonry through covalent bonding to surface hydroxyl groups
  • Textile and paper processing: release coatings and hydrophobic finishes on fiber and sheet materials
  • It functions as a trifunctional crosslinker and surface modifier, enabling the formation of durable siloxane networks.

Good to know: Buyers should confirm moisture-controlled packaging requirements, as the product reacts with atmospheric humidity during storage.

Commercial specifications

  • Purity levels are typically at 98% or higher as standard for industrial applications.
  • Colorless, fuming liquid in standard industrial packaging including drums and ISO tank containers for bulk procurement.

Other Names (Synonyms)

Methyl-trichlorsilan|Silane, trichloromethyl-|Methylsilyl trichloride|Silane, methyltrichloro-|MTS

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What are the physical properties of Methyltrichlorosilane?

Melting Point -90 °C
Boiling Point 66.4 °C
Density 1.27 g/cm³ @ Temp: 25 °C
Flash Point 5 °F
Appearance Colorless clear liquid
Color colorless
Odor Sharp, irritating odor
Form liquid
Water Solubility REACTS
Vapor Pressure 150 mm Hg ( 25 °C)
Refractive Index n 20/D 1.411

How is Methyltrichlorosilane classified and handled safely? Learn More

Danger
GHS02· Flammable GHS07· Irritant GHS05· Corrosive

Hazard Statements

H225 Highly Flammable liquid and vapor
H302 Harmful if swallowed
H312 Harmful in contact with skin
H314 Causes severe skin burns and eye damage

Precautionary Statements

P210 Keep away from heat, hot surfaces, sparks, open flames and other ignition sources. No smoking.
P233 Keep container tightly closed.
P240 Ground and bond container and receiving equipment.
P241 Use explosion-proof [electrical/ventilating/lighting/…] equipment.

Which trade and regulatory codes apply to Methyltrichlorosilane?

HS Code 29310095
UN Number 1250
ADR Class 3
Packing Group I
Storage Class 3 - Flammable liquids
WGK (Germany) 1
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