Tellurium dioxide

Tellurium dioxide (CAS 7446-07-3), also abbreviated as TeO2, is an inorganic oxide of tellurium used primarily in electronics and specialty chemical manufacturing.

Where is Tellurium dioxide used?

• Acousto-optic devices: crystals for deflectors, modulators and tunable filters in laser systems and telecommunications equipment
• Precursor in the production of tellurite glass for fiber optic amplifiers and infrared-transmitting optical components
• Catalysis: supports selective oxidation reactions in specialty chemical synthesis, including fine chemicals and pharmaceutical intermediates
• Semiconductor fabrication: sputtering target material for thin-film deposition
• It is used for phase-change memory applications.

Commercial specifications

• Purity levels commonly range from 99% to 99.999% (5N)
• High-purity sputtering targets are available as pressed and sintered forms to meet semiconductor-grade specifications
• Packaging is typically offered in small laboratory quantities through to kilogram-scale lots depending on purity grade