Carbon tetrafluoride

Carbon tetrafluoride (CAS 75-73-0), also known as PFC-14 and Freon 14, is a fluorinated gas used primarily as a plasma etching and cleaning agent in semiconductor and electronics manufacturing.

Where is Carbon tetrafluoride used?

• Semiconductor fabrication: plasma etch gas for silicon dioxide and silicon nitride layers
• Integrated circuit production: precise patterning
• Electronics: chamber cleaning in CVD equipment, removing deposited residues without damaging sensitive components
• Aerospace and defense: reference gas and dielectric medium in specialized testing and calibration environments
• Cryogenic and atmospheric research programs source it as a tracer gas.

Good to know: Its long atmospheric residence time and measurable background concentration suit it to tracer use.

Commercial specifications

• Purity grades from industrial to high-purity
• Electronic-grade specifications typically 99.9% purity and above
• Certified reference mixtures for calibration and analytical use